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Investigation of etching and deposition processes of Cl2/O2/Ar inductively coupled plasmas on silicon by means of plasmasurface simulations and experiments”. Tinck S, Boullart W, Bogaerts A, Journal of physics: D: applied physics 42, 095204 (2009). http://doi.org/10.1088/0022-3727/42/9/095204
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Investigation of active species in low-pressure capacitively coupled N-2/Ar plasmas”. Liang Y-S, Xue C, Zhang Y-R, Wang Y-N, Physics Of Plasmas 28, 013510 (2021). http://doi.org/10.1063/5.0031120
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Modeling adatom surface processes during crystal growth: a new implementation of the Metropolis Monte Carlo algorithm”. Eckert M, Neyts E, Bogaerts A, CrystEngComm 11, 1597 (2009). http://doi.org/10.1039/b822973m
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Numerical modelling for a dielectric barrier discharge at atmospheric pressure in nitrogen”. Madani M, Bogaerts A, Vangeneugden D, , 53 (2005)
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Numerical analysis of the NO and O generation mechanism in a needle-type plasma jet”. Van Gaens W, Bruggeman PJ, Bogaerts A, New journal of physics 16, 063054 (2014). http://doi.org/10.1088/1367-2630/16/6/063054
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Numerical analysis of the effect of nitrogen and oxygen admixtures on the chemistry of an argon plasma jet operating at atmospheric pressure”. Van Gaens W, Iseni S, Schmidt-Bleker A, Weltmann K-D, Reuter S, Bogaerts A, New journal of physics 17, 033003 (2015). http://doi.org/10.1088/1367-2630/17/3/033003
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CO2and CH4conversion in “real&rdquo, gas mixtures in a gliding arc plasmatron: how do N2and O2affect the performance?”.Slaets J, Aghaei M, Ceulemans S, Van Alphen S, Bogaerts A, Green Chemistry 22, 1366 (2020). http://doi.org/10.1039/C9GC03743H
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Effects of silicon doping on strengthening adhesion at the interface of the hydroxyapatite-titanium biocomposite : a first-principles study”. Grubova IY, Surmeneva MA, Huygh S, Surmenev RA, Neyts EC, Computational materials science 159, 228 (2019). http://doi.org/10.1016/J.COMMATSCI.2018.12.026
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Reaction pathways of biomedically active species in an Ar plasma jet”. Van Gaens W, Bogaerts A, Plasma sources science and technology 23, 035015 (2014). http://doi.org/10.1088/0963-0252/23/3/035015
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Plasma-Surface Interactions in Plasma Catalysis”. Neyts EC, Plasma chemistry and plasma processing 36, 185 (2016). http://doi.org/10.1007/s11090-015-9662-5
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The influence of impurities on the performance of the dielectric barrier discharge”. Martens T, Bogaerts A, Brok WJM, van Dijk J, Applied physics letters 96, 091501 (2010). http://doi.org/10.1063/1.3327800
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Asymmetry and switching phenomenology in TiN\ (Al2O3) \ HfO2 \ Hf systems”. Goux L, Fantini A, Govoreanu B, Kar G, Clima S, Chen Y-Y, Degraeve R, Wouters DJ, Pourtois G, Jurczak M, ECS solid state letters 1, 63 (2012). http://doi.org/10.1149/2.003204ssl
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Insights into Ni-filament formation in unipolar-switching Ni/HfO2/TiN resistive random access memory device”. Chen YY, Pourtois G, Adelmann C, Goux L, Govoreanu B, Degreave R, Jurczak M, Kittl JA, Groeseneken G, Wouters DJ, Applied physics letters 100, 113513 (2012). http://doi.org/10.1063/1.3695078
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Prediction of the decomposition tendency of C5F10O on discharged metal surfaces”. Cui Z, Jafarzadeh A, Hao Y, Liu L, Li L, Zheng Y, IEEE transactions on dielectrics and electrical insulation 30, 1365 (2023). http://doi.org/10.1109/TDEI.2023.3263129
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Pulse shape influence on the atmospheric barrier discharge”. Martens T, Bogaerts A, van Dijk J, Applied physics letters 96, 131503 (2010). http://doi.org/10.1063/1.3315881
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The influence of power and frequency on the filamentary behavior of a flowing DBD—application to the splitting of CO2”. Ozkan A, Dufour T, Silva T, Britun N, Snyders R, Bogaerts A, Reniers F, Plasma sources science and technology 25, 025013 (2016). http://doi.org/10.1088/0963-0252/25/2/025013
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Probing the intrinsic limitations of the contact resistance of metal/semiconductor interfaces through atomistic simulations”. Pourtois G, Dabral A, Sankaran K, Magnus W, Yu H, de de Meux AJ, Lu AKA, Clima S, Stokbro K, Schaekers M, Houssa M, Collaert N, Horiguchi N, Semiconductors, Dielectrics, And Metals For Nanoelectronics 15: In Memory Of Samares Kar , 303 (2017). http://doi.org/10.1149/08001.0303ECST
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Study of the intrinsic limitations of the contact resistance of metal/semiconductor interfaces through atomistic simulations”. Dabral A, Pourtois G, Sankaran K, Magnus W, Yu H, de de Meux AJ, Lu AKA, Clima S, Stokbro K, Schaekers M, Collaert N, Horiguchi N, Houssa M, ECS journal of solid state science and technology 7, N73 (2018). http://doi.org/10.1149/2.0041806JSS
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Combining molecular dynamics with Monte Carlo simulations : implementations and applications”. Neyts EC, Bogaerts A, Theoretical chemistry accounts : theory, computation, and modeling 132, 1320 (2013). http://doi.org/10.1007/s00214-012-1320-x
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A 3D model of a reverse vortex flow gliding arc reactor”. Trenchev G, Kolev S, Bogaerts A, Plasma sources science and technology 25, 035014 (2016). http://doi.org/10.1088/0963-0252/25/3/035014
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Simultaneous etching and deposition processes during the etching of silicon with a Cl2/O2/Ar inductively coupled plasma”. Tinck S, Bogaerts A, Shamiryan D, Plasma processes and polymers 8, 490 (2011). http://doi.org/10.1002/ppap.201000189
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Influence of Al content on the properties of MgO grown by reactive magnetron sputtering”. Saraiva M, Chen H, Leroy WP, Mahieu S, Jehanathan N, Lebedev O, Georgieva V, Persoons R, Depla D, Plasma processes and polymers 6, S751 (2009). http://doi.org/10.1002/ppap.200931809
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Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors”. Vereecke G, De Coster H, Van Alphen S, Carolan P, Bender H, Willems K, Ragnarsson L-A, Van Dorpe P, Horiguchi N, Holsteyns F, Microelectronic engineering 200, 56 (2018). http://doi.org/10.1016/J.MEE.2018.09.004
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Does non-thermal plasma modify biopolymers in solution? A chemical and mechanistic study for alginate”. Tampieri F, Espona-Noguera A, Labay C, Ginebra M-P, Yusupov M, Bogaerts A, Canal C, Biomaterials Science (2023). http://doi.org/10.1039/D3BM00212H
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Study of an AC dielectric barrier single micro-discharge filament over a water film”. Vanraes P, Nikiforov A, Bogaerts A, Leys C, Scientific reports 8, 10919 (2018). http://doi.org/10.1038/s41598-018-29189-w
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On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films”. Dhayalan SK, Kujala J, Slotte J, Pourtois G, Simoen E, Rosseel E, Hikavyy A, Shimura Y, Iacovo S, Stesmans A, Loo R, Vandervorst W;, Applied physics letters 108, 082106 (2016). http://doi.org/10.1063/1.4942605
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Temperature influence on the reactivity of plasma species on a nickel catalyst surface : an atomic scale study”. Somers W, Bogaerts A, van Duin ACT, Huygh S, Bal KM, Neyts EC, Catalysis today 211, 131 (2013). http://doi.org/10.1016/j.cattod.2013.02.010
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Inactivation of human pancreatic ductal adenocarcinoma with atmospheric plasma treated media and water: a comparative study”. Kumar N, Attri P, Dewilde S, Bogaerts A, Journal of physics: D: applied physics 51, 255401 (2018). http://doi.org/10.1088/1361-6463/aac571
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Hampering Effect of Cholesterol on the Permeation of Reactive Oxygen Species through Phospholipids Bilayer: Possible Explanation for Plasma Cancer Selectivity”. Van der Paal J, Verheyen C, Neyts EC, Bogaerts A, Scientific reports 7, 39526 (2017). http://doi.org/10.1038/srep39526
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Ceramide cross-linking leads to pore formation: Potential mechanism behind CAP enhancement of transdermal drug delivery”. Van der Paal J, Fridman G, Bogaerts A, Plasma processes and polymers 16, 1900122 (2019). http://doi.org/10.1002/PPAP.201900122
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