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	Author	Stuer, G.; Bender, H.; van Landuyt, J.; Eyben, P.
	Title	Stress analysis with convergent beam electron diffraction around NMOS transistors			Type	P1 Proceeding
	Year	2001	Publication		Abbreviated Journal
	Volume		Issue		Pages	359-360
	Keywords	P1 Proceeding; Electron microscopy for materials research (EMAT); Internet Data Lab (IDLab)
	Abstract
	Address
	Corporate Author				Thesis
	Publisher	Princeton University Press	Place of Publication	Princeton, N.J.	Editor
	Language		Wos		Publication Date	0000-00-00
	Series Editor		Series Title		Abbreviated Series Title
	Series Volume		Series Issue		Edition
	ISSN	1-58949-003-7	ISBN		Additional Links	UA library record; WoS full record;
	Impact Factor		Times cited		Open Access
	Notes				Approved	Most recent IF: NA
	Call Number	UA @ lucian @ c:irua:95736			Serial	3176
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