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Jalabert, D.; Pelloux-Gervais, D.; Béché, A.; Hartmann, J.M.; Gergaud, P.; Rouvière, J.L.; Canut, B. Depth strain profile with sub-nm resolution in a thin silicon film using medium energy ion scattering 2012 Physica Status Solidi A-Applications And Materials Science 209 3 UA library record; WoS full record; WoS citing articles doi
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