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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Vanraes, P.; Parayil Venugopalan, S.; Besemer, M.; Bogaerts, A. Assessing neutral transport mechanisms in aspect ratio dependent etching by means of experiments and multiscale plasma modeling 2023 Plasma Sources Science and Technology 32 UA library record; WoS full record; WoS citing articles pdf url doi
Vanraes, P.; Parayil Venugopalan, S.; Bogaerts, A. Multiscale modeling of plasma–surface interaction—General picture and a case study of Si and SiO2etching by fluorocarbon-based plasmas 2021 Applied Physics Reviews 8 UA library record; WoS full record; WoS citing articles pdf url doi
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