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Author |
Title |
Year |
Publication |
Volume  |
Times cited |
Additional Links |
Links |
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Georgieva, V.; Bogaerts, A.; Gijbels, R. |
Numerical study of Ar/CF4/N2 discharges in single and dual frequency capacitively coupled plasma reactors |
2003 |
Journal of applied physics |
94 |
90 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Baguer, N.; Bogaerts, A.; Gijbels, R. |
Role of the fast Ar atoms, Ar+ ions and metastable Ar atoms in a hollow cathode glow discharge: study by a hybrid model |
2003 |
Journal of applied physics |
94 |
19 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Georgieva, V.; Bogaerts, A.; Gijbels, R. |
Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/Cf4 discharge: effect of gas composition |
2003 |
Journal of applied physics |
93 |
57 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Neyts, E.; Yan, M.; Bogaerts, A.; Gijbels, R. |
Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: effect of adding H2 to an Ar discharge |
2003 |
Journal of applied physics |
93 |
15 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Baguer, N.; Bogaerts, A.; Gijbels, R. |
Study of a hollow cathode glow discharge in He: Monte Carlo-fluid model combined with a transport model for the metastable atoms |
2003 |
Journal of applied physics |
93 |
24 |
UA library record; WoS full record; WoS citing articles |
|
|
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Bogaerts, A.; Gijbels, R. |
Hybrid modeling network for a helium-argon-copper hollow cathode discharge used for laser applications |
2002 |
Journal of applied physics |
92 |
24 |
UA library record; WoS full record; WoS citing articles |
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Ignatova, V.A.; Lebedev, O.I.; Watjen, U.; van Vaeck, L.; van Landuyt, J.; Gijbels, R.; Adams, F. |
Metal and composite nanocluster precipitate formation in silicon dioxide implanted with Sb+ ions |
2002 |
Journal of applied physics |
92 |
5 |
UA library record; WoS full record; WoS citing articles |
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Herrebout, D.; Bogaerts, A.; Yan, M.; Gijbels, R.; Goedheer, W.; Vanhulsel, A. |
Modeling of a capacitively coupled radio-frequency methane plasma: comparison between a one-dimensional and a two-dimensional fluid model |
2002 |
Journal of applied physics |
92 |
15 |
UA library record; WoS full record; WoS citing articles |
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Herrebout, D.; Bogaerts, A.; Yan, M.; Goedheer, W.; Dekempeneer, E.; Gijbels, R. |
1D fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers |
2001 |
Journal of applied physics |
90 |
83 |
UA library record; WoS full record; WoS citing articles |
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|
de Witte, H.; Vandervorst, W.; Gijbels, R. |
Modeling of bombardment induced oxidation of silicon |
2001 |
Journal of applied physics |
89 |
16 |
UA library record; WoS full record; WoS citing articles |
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Bogaerts, A.; Gijbels, R.; Serikov, V.V. |
Calculation of gas heating in direct current argon glow discharges |
2000 |
Journal of applied physics |
87 |
63 |
UA library record; WoS full record; WoS citing articles |
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Yan, M.; Bogaerts, A.; Gijbels, R.; Goedheer, W.J. |
Spatial behavior of energy relaxation of electrons in capacitively coupled discharges: comparison between Ar and SiH4 |
2000 |
Journal of applied physics |
87 |
14 |
UA library record; WoS full record; WoS citing articles |
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Bogaerts, A.; Yan, M.; Gijbels, R.; Goedheer, W. |
Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge |
1999 |
Journal of applied physics |
86 |
18 |
UA library record; WoS full record; WoS citing articles |
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|
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Bogaerts, A.; Gijbels, R. |
Role of Ar2+ and Ar+2 ions in a direct current argon glow discharge: a numerical description |
1999 |
Journal of applied physics |
86 |
50 |
UA library record; WoS full record; WoS citing articles |
|
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Martin, J.M.L.; El-Yazal, J.; François, J.P.; Gijbels, R. |
The structure and energetics of B3N2, B2N3, and BN4: symmetry breaking effects in B3N2 |
1995 |
Molecular physics |
85 |
19 |
UA library record; WoS full record; WoS citing articles |
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Bogaerts, A.; Gijbels, R.; Vlcek, J. |
Collisional-radiative model for an argon glow discharge |
1998 |
Journal of applied physics |
84 |
138 |
UA library record; WoS full record; WoS citing articles |
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Martin, J.M.L.; Slanina, Z.; François, J.P.; Gijbels, R. |
The structure, energetics, and harmonic vibrations of B3N and BN3 |
1994 |
Molecular physics |
82 |
19 |
UA library record; WoS full record; WoS citing articles |
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Ignatova, V.A.; Möller, W.; Conard, T.; Vandervorst, W.; Gijbels, R. |
Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation |
2005 |
Applied physics A : materials science & processing |
81 |
4 |
UA library record; WoS full record; WoS citing articles |
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Bogaerts, A.; Gijbels, R. |
Role of sputtered Cu atoms and ions in a direct current glow discharge: combined fluid and Monte Carlo model |
1996 |
Journal of applied physics |
79 |
81 |
UA library record; WoS full record; WoS citing articles |
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Bogaerts, A.; Gijbels, R.; Goedheer, W. |
Hybrid Monte Carlo-fluid model of a direct current glow discharge |
1995 |
Journal of applied physics |
78 |
117 |
UA library record; WoS full record; WoS citing articles |
|
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Bogaerts, A.; Gijbels, R. |
The role of fast argon ions and atoms in the ionization of argon in a direct current glow discharge: a mathematical simulation |
1995 |
Journal of applied physics |
78 |
60 |
UA library record; WoS full record; WoS citing articles |
|
|
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Bogaerts, A.; van Straaten, M.; Gijbels, R. |
Description of the thermalization process of the sputtered atoms in a glow discharge using a 3-dimensional Monte Carlo method |
1995 |
Journal of applied physics |
77 |
87 |
UA library record; WoS full record; WoS citing articles |
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Kalitzova, M.; Vlakhov, E.; Marinov, Y.; Gesheva, K.; Ignatova, V.A.; Lebedev, O.; Muntele, C.; Gijbels, R. |
Effect of high-frequency electromagnetic field on Te+-implanted (001) Si</tex> |
2004 |
Vacuum: the international journal and abstracting service for vacuum science and technology |
76 |
2 |
UA library record; WoS full record; WoS citing articles |
|
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Adriaensen, L.; Vangaever, F.; Gijbels, R. |
Metal-assisted secondary ion mass spectrometry: the influence of Ag and Au deposition on molecular ion yields |
2004 |
Analytical chemistry |
76 |
67 |
UA library record; WoS full record; WoS citing articles |
|
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Kolev, I.; Bogaerts, A.; Gijbels, R. |
Influence of electron recapture by the cathode upon the discharge characteristics in dc planar magnetrons |
2005 |
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics |
72 |
29 |
UA library record; WoS full record; WoS citing articles |
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Gregory, C.L.; Nullens, H.A.; Gijbels, R.H.; van Espen, P.J.; Geuens, I.; de Keyzer, R. |
Automated particle analysis of populations of silver halide microcrystals by electron probe microanalysis under cryogenic conditions |
1998 |
Analytical chemistry |
70 |
12 |
UA library record; WoS full record; WoS citing articles |
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Poels, K.; van Vaeck, L.; Gijbels, R. |
Microprobe speciation analysis of inorganic solids by Fourier transform laser mass spectrometry |
1998 |
Analytical chemistry |
70 |
32 |
UA library record; WoS full record; WoS citing articles |
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Ignatova, V.A.; van Vaeck, L.; Gijbels, R.; Adams, F. |
Capabilities and limitations of Fourier transform laser microprobe mass spectrometry for molecular analysis of solids |
2002 |
Vacuum |
69 |
4 |
UA library record; WoS full record; WoS citing articles |
|
|
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Bogaerts, A.; Gijbels, R. |
Modeling of glow discharges: what can we learn from it? |
1997 |
Analytical chemistry A-pages |
69 |
|
UA library record |
|
|
|
Georgieva, V.; Bogaerts, A.; Gijbels, R. |
Numerical investigation of ion energy distribution functions in single and dual frequency capacitively coupled plasma reactors |
2004 |
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics |
69 |
97 |
UA library record; WoS full record; WoS citing articles |
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