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	Author	Title	Year	Publication	Volume	Times cited	Additional Links	Links
	Delabie, A.; Sioncke, S.; Rip, J.; Van Elshocht, S.; Pourtois, G.; Mueller, M.; Beckhoff, B.; Pierloot, K.	Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates	2012	Journal of vacuum science and technology: A: vacuum surfaces and films	30	41	UA library record; WoS full record; WoS citing articles
	Delabie, A.; Sioncke, S.; Rip, J.; van Elshocht, S.; Caymax, M.; Pourtois, G.; Pierloot, K.	Mechanisms for the trimethylaluminum reaction in aluminum oxide atomic layer deposition on sulfur passivated germanium	2011	The journal of physical chemistry: C : nanomaterials and interfaces	115	9	UA library record; WoS full record; WoS citing articles

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