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Author
Title
Year
Publication
Volume
Times cited
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Gou, F.
;
Neyts, E.
;
Eckert, M.
;
Tinck, S.
;
Bogaerts, A.
Molecular dynamics simulations of Cl
+
etching on a Si(100) surface
2010
Journal of applied physics
107
15
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;
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;
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