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| Author | Bals, S.; Tirry, W.; Geurts, R.; Yang, Z.; Schryvers, D. | ||||
| Title | High-quality sample preparation by low kV FIB thinning for analytical TEM measurements | Type | A1 Journal article | ||
Year  |
2007 | Publication | Microscopy and microanalysis | Abbreviated Journal | Microsc Microanal |
| Volume | 13 | Issue | 2 | Pages | 80-86 |
| Keywords | A1 Journal article; Electron microscopy for materials research (EMAT) | ||||
| Abstract | Focused ion beam specimen preparation has been used for NiTi samples and SrTiO(3)/SrRuO(3) multilayers with prevention of surface amorphization and Ga implantation by a 2-kV cleaning procedure. Transmission electron microscopy techniques show that the samples are of high quality with a controlled thickness over large scales. Furthermore, preferential thinning effects in multicompounds are avoided, which is important when analytical transmission electron microscopy measurements need to be interpreted in a quantitative manner. The results are compared to similar measurements acquired for samples obtained using conventional preparation techniques such as electropolishing for alloys and ion milling for oxides. | ||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | Place of Publication | Cambridge, Mass. | Editor | ||
| Language | Wos | 000245662200002 | Publication Date | 2007-03-19 | |
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | 1431-9276;1435-8115; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
| Impact Factor | 1.891 | Times cited | 82 | Open Access | |
| Notes | Fwo; Goa | Approved | Most recent IF: 1.891; 2007 IF: 1.941 | ||
| Call Number | UA @ lucian @ c:irua:65850 | Serial | 1441 | ||
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