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Author Bals, S.; Tirry, W.; Geurts, R.; Yang, Z.; Schryvers, D. doi  openurl
  Title High-quality sample preparation by low kV FIB thinning for analytical TEM measurements Type A1 Journal article
  Year (down) 2007 Publication Microscopy and microanalysis Abbreviated Journal Microsc Microanal  
  Volume 13 Issue 2 Pages 80-86  
  Keywords A1 Journal article; Electron microscopy for materials research (EMAT)  
  Abstract Focused ion beam specimen preparation has been used for NiTi samples and SrTiO(3)/SrRuO(3) multilayers with prevention of surface amorphization and Ga implantation by a 2-kV cleaning procedure. Transmission electron microscopy techniques show that the samples are of high quality with a controlled thickness over large scales. Furthermore, preferential thinning effects in multicompounds are avoided, which is important when analytical transmission electron microscopy measurements need to be interpreted in a quantitative manner. The results are compared to similar measurements acquired for samples obtained using conventional preparation techniques such as electropolishing for alloys and ion milling for oxides.  
  Address  
  Corporate Author Thesis  
  Publisher Place of Publication Cambridge, Mass. Editor  
  Language Wos 000245662200002 Publication Date 2007-03-19  
  Series Editor Series Title Abbreviated Series Title  
  Series Volume Series Issue Edition  
  ISSN 1431-9276;1435-8115; ISBN Additional Links UA library record; WoS full record; WoS citing articles  
  Impact Factor 1.891 Times cited 82 Open Access  
  Notes Fwo; Goa Approved Most recent IF: 1.891; 2007 IF: 1.941  
  Call Number UA @ lucian @ c:irua:65850 Serial 1441  
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