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Author |
Title |
Year |
Publication |
Volume |
Times cited |
Additional Links |
Links |
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Bogaerts, A. |
Effects of oxygen addition to argon glow discharges: a hybrid Monte Carlo-fluid modeling investigation |
2009 |
Spectrochimica acta: part B : atomic spectroscopy |
64 |
39 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Liu, Y.-X.; Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. |
Electromagnetic effects in high-frequency large-area capacitive discharges : a review |
2015 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
33 |
10 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Okhrimovskyy, A.; Bogaerts, A.; Gijbels, R. |
Electron anisotropic scattering in gases: a formula for Monte Carlo simulations |
2002 |
Physical review : E : statistical, nonlinear, and soft matter physics |
65 |
57 |
UA library record; WoS full record; WoS citing articles |
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|
Liu, Y.-X.; Zhang, Q.-Z.; Liu, L.; Song, Y.-H.; Bogaerts, A.; Wang, Y.-N. |
Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges |
2013 |
Plasma sources science and technology |
22 |
20 |
UA library record; WoS full record; WoS citing articles |
|
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|
Yan, M.; Bogaerts, A.; Goedheer, W.J.; Gijbels, R. |
Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative SiH4 discharges |
2000 |
Plasma sources science and technology |
9 |
21 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Yusupov, M.; Bultinck, E.; Depla, D.; Bogaerts, A. |
Elucidating the asymmetric behavior of the discharge in a dual magnetron sputter deposition system |
2011 |
Applied physics letters |
98 |
4 |
UA library record; WoS full record; WoS citing articles |
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|
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Van Laer, K.; Tinck, S.; Samara, V.; de Marneffe, J.F.; Bogaerts, A. |
Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma : modeling and experimental investigation |
2013 |
Plasma sources science and technology |
22 |
13 |
UA library record; WoS full record; WoS citing articles |
|
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|
Kozák, T.; Bogaerts, A. |
Evaluation of the energy efficiency of CO2 conversion in microwave discharges using a reaction kinetics model |
2015 |
Plasma sources science and technology |
24 |
100 |
UA library record; WoS full record; WoS citing articles |
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|
Yan, M.; Bogaerts, A.; Gijbels, R. |
Evolution of charged particle densities after laser-induced photodetachment in a strongly electronegative RF discharge |
2002 |
IEEE transactions on plasma science |
30 |
|
UA library record; WoS full record |
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|
|
van Straaten, M.; Bogaerts, A.; Gijbels, R. |
Experimental determination of the energy distribution of ions bombarding the cathode surface in a glow discharge |
1995 |
Spectrochimica acta: part B : atomic spectroscopy |
50 |
22 |
UA library record; WoS full record; WoS citing articles |
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De Bie, C.; Verheyde, B.; Martens, T.; van Dijk, J.; Paulussen, S.; Bogaerts, A. |
Fluid modeling of the conversion of methane into higher hydrocarbons in an atmospheric pressure dielectric barrier discharge |
2011 |
Plasma processes and polymers |
8 |
70 |
UA library record; WoS full record; WoS citing articles |
|
|
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Petrović, D.; Martens, T.; van Dijk, J.; Brok, W.J.M.; Bogaerts, A. |
Fluid modelling of an atmospheric pressure dielectric barrier discharge in cylindrical geometry |
2009 |
Journal of physics: D: applied physics |
42 |
29 |
UA library record; WoS full record; WoS citing articles |
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Zhang, Y.-R.; Gao, F.; Li, X.-C.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the bias effect in inductive/capacitive discharges |
2015 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
33 |
9 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Zhang, Y.-R.; Xu, X.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: 1 : transient behaviour of electrodynamics and power deposition |
2012 |
Journal of physics: D: applied physics |
45 |
57 |
UA library record; WoS full record; WoS citing articles |
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Zhang, Y.-R.; Xu, X.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: 2 : radial uniformity of the plasma characteristics |
2012 |
Journal of physics: D: applied physics |
45 |
15 |
UA library record; WoS full record; WoS citing articles |
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Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the phase-shift effect in Ar/CF4 capacitively coupled plasmas |
2012 |
Journal of physics: D: applied physics |
45 |
8 |
UA library record; WoS full record; WoS citing articles |
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Si, X.-J.; Zhao, S.-X.; Xu, X.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma |
2011 |
Physics of plasmas |
18 |
7 |
UA library record; WoS full record; WoS citing articles |
|
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Tinck, S.; Neyts, E.C.; Bogaerts, A. |
Fluorinesilicon surface reactions during cryogenic and near room temperature etching |
2014 |
The journal of physical chemistry: C : nanomaterials and interfaces |
118 |
11 |
UA library record; WoS full record; WoS citing articles |
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Tinck, S.; Altamirano-Sánchez, E.; De Schepper, P.; Bogaerts, A. |
Formation of a nanoscale SiO2 capping layer on photoresist lines with an Ar/SiCl4/O2 inductively coupled plasma : a modeling investigation |
2014 |
Plasma processes and polymers |
11 |
1 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Neyts, E.C.; Bogaerts, A. |
Formation of endohedral Ni@C60 and exohedral NiC60 metallofullerene complexes by simulated ion implantation |
2009 |
Carbon |
47 |
15 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Neyts, E.C.; van Duin, A.C.T.; Bogaerts, A. |
Formation of single layer graphene on nickel under far-from-equilibrium high flux conditions |
2013 |
Nanoscale |
5 |
25 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Bogaerts, A.; Gijbels, R. |
Fundamental aspects and applications of glow discharge spectrometric techniques |
1998 |
Spectrochimica acta: part B : atomic spectroscopy |
53 |
49 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Gamez, G.; Bogaerts, A.; Andrade, F.; Hieftje, G.M. |
Fundamental studies on a planar-cathode direct current glow discharge: part 1: characterization via laser scattering techniques |
2004 |
Spectrochimica acta: part B : atomic spectroscopy |
59 |
24 |
UA library record; WoS full record; WoS citing articles |
|
|
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Bogaerts, A.; Gijbels, R.; Gamez, G.; Hieftje, G.M. |
Fundamental studies on a planar-cathode direct current glow discharge: part 2: numerical modeling and comparison with laser scattering experiments |
2004 |
Spectrochimica acta: part B : atomic spectroscopy |
59 |
26 |
UA library record; WoS full record; WoS citing articles |
|
|
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Bogaerts, A.; Neyts, E.; Gijbels, R.; van der Mullen, J. |
Gas discharge plasmas and their applications |
2002 |
Spectrochimica acta: part B : atomic spectroscopy |
57 |
462 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Aerts, R.; Tu, X.; Van Gaens, W.; Whitehead, J.C.; Bogaerts, A. |
Gas purification by nonthermal plasma : a case study of ethylene |
2013 |
Environmental science and technology |
47 |
56 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. |
Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma |
2013 |
Plasma sources science and technology |
22 |
11 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Bogaerts, A. |
The glow discharge: an exciting plasma |
1999 |
Journal of analytical atomic spectrometry |
14 |
29 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Bogaerts, A.; Chen, Z.; Gijbels, R. |
Glow discharge modelling: from basic understanding towards applications |
2003 |
Surface and interface analysis |
35 |
14 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Angeli, J.; Bengtson, A.; Bogaerts, A.; Hoffmann, V.; Hodoroaba, V.-D.; Steers, E. |
Glow discharge optical emission spectrometry: moving towards reliable thin film analysis: a short review |
2003 |
Journal of analytical atomic spectrometry |
18 |
75 |
UA library record; WoS full record; WoS citing articles |
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