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Author |
Title |
Year |
Publication |
Volume |
Times cited |
Additional Links |
Links |
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Zhang, Y.; Jiang, W.; Zhang, Q.Z.; Bogaerts, A. |
Computational study of plasma sustainability in radio frequency micro-discharges |
2014 |
Journal of applied physics |
115 |
11 |
UA library record; WoS full record; WoS citing articles |
|
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Neyts, E.C.; Ostrikov, K.; Han, Z.J.; Kumar, S.; van Duin, A.C.T.; Bogaerts, A. |
Defect healing and enhanced nucleation of carbon nanotubes by low-energy ion bombardment |
2013 |
Physical review letters |
110 |
50 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Bogaerts, A.; van Straaten, M.; Gijbels, R. |
Description of the thermalization process of the sputtered atoms in a glow discharge using a 3-dimensional Monte Carlo method |
1995 |
Journal of applied physics |
77 |
87 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Kolev, I.; Bogaerts, A. |
Detailed numerical investigation of a DC sputter magnetron |
2006 |
IEEE transactions on plasma science |
34 |
28 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Martens, T.; Bogaerts, A.; Brok, W.J.M.; van Dijk, J. |
The dominant role of impurities in the composition of high pressure noble gas plasmas |
2008 |
Applied physics letters |
92 |
115 |
UA library record; WoS full record; WoS citing articles |
|
|
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Chen, Z.; Bleiner, D.; Bogaerts, A. |
Effect of ambient pressure on laser ablation and plume expansion dynamics: a numerical simulation |
2006 |
Journal of applied physics |
99 |
42 |
UA library record; WoS full record; WoS citing articles |
|
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Liu, Y.-X.; Zhang, Q.-Z.; Liu, J.; Song, Y.-H.; Bogaerts, A.; Wang, Y.-N. |
Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas |
2012 |
Applied physics letters |
101 |
26 |
UA library record; WoS full record; WoS citing articles |
|
|
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Neyts, E.; Bogaerts, A.; van de Sanden, M.C.M. |
Effect of hydrogen on the growth of thin hydrogenated amorphous carbon films from thermal energy radicals |
2006 |
Applied physics letters |
88 |
35 |
UA library record; WoS full record; WoS citing articles |
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Zhao, S.-X.; Gao, F.; Wang, Y.-P.; Wang, Y.-N.; Bogaerts, A. |
Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma |
2015 |
Journal of applied physics |
118 |
1 |
UA library record; WoS full record; WoS citing articles |
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Yusupov, M.; Bultinck, E.; Depla, D.; Bogaerts, A. |
Elucidating the asymmetric behavior of the discharge in a dual magnetron sputter deposition system |
2011 |
Applied physics letters |
98 |
4 |
UA library record; WoS full record; WoS citing articles |
|
|
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Yan, M.; Bogaerts, A.; Gijbels, R. |
Evolution of charged particle densities after laser-induced photodetachment in a strongly electronegative RF discharge |
2002 |
IEEE transactions on plasma science |
30 |
|
UA library record; WoS full record |
|
|
|
Zhang, Q.-Z.; Wang, Y.-N.; Bogaerts, A. |
Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF4 discharge |
2014 |
Journal of applied physics |
115 |
9 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Bogaerts, A.; Gijbels, R. |
Hybrid modeling network for a helium-argon-copper hollow cathode discharge used for laser applications |
2002 |
Journal of applied physics |
92 |
24 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Bogaerts, A.; Gijbels, R.; Goedheer, W. |
Hybrid Monte Carlo-fluid model of a direct current glow discharge |
1995 |
Journal of applied physics |
78 |
117 |
UA library record; WoS full record; WoS citing articles |
|
|
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Bultinck, E.; Kolev, I.; Bogaerts, A.; Depla, D. |
The importance of an external circuit in a particle-in-cell/Monte Carlo collisions model for a direct current planar magnetron |
2008 |
Journal of applied physics |
103 |
29 |
UA library record; WoS full record; WoS citing articles |
|
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Okhrimovskyy, A.; Bogaerts, A.; Gijbels, R. |
Incorporating the gas flow in a numerical model of rf discharges in methane |
2004 |
Journal of applied physics |
96 |
11 |
UA library record; WoS full record; WoS citing articles |
|
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Martens, T.; Bogaerts, A.; Brok, W.J.M.; van Dijk, J. |
The influence of impurities on the performance of the dielectric barrier discharge |
2010 |
Applied physics letters |
96 |
28 |
UA library record; WoS full record; WoS citing articles |
|
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Bogaerts, A.; Naylor, J.; Hatcher, M.; Jones, W.J.; Mason, R. |
Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: modeling and comparison with experiment |
1998 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
16 |
12 |
UA library record; WoS full record; WoS citing articles |
|
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de Bleecker, K.; Bogaerts, A.; Goedheer, W.; Gijbels, R. |
Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model |
2004 |
IEEE transactions on plasma science |
32 |
29 |
UA library record; WoS full record; WoS citing articles |
|
|
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Chen, Z.; Bogaerts, A. |
Laser ablation of Cu and plume expansion into 1 atm ambient gas |
2005 |
Journal of applied physics |
97 |
131 |
UA library record; WoS full record; WoS citing articles |
|
|
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Bleiner, D.; Bogaerts, A.; Belloni, F.; Nassisi, V. |
Laser-induced plasmas from the ablation of metallic targets: the problem of the onset temperature, and insights on the expansion dynamics |
2007 |
Journal of applied physics |
101 |
31 |
UA library record; WoS full record; WoS citing articles |
|
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Zhang, Y.-R.; Tinck, S.; De Schepper, P.; Wang, Y.-N.; Bogaerts, A. |
Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime |
2015 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
33 |
3 |
UA library record; WoS full record; WoS citing articles |
|
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Herrebout, D.; Bogaerts, A.; Yan, M.; Gijbels, R.; Goedheer, W.; Vanhulsel, A. |
Modeling of a capacitively coupled radio-frequency methane plasma: comparison between a one-dimensional and a two-dimensional fluid model |
2002 |
Journal of applied physics |
92 |
15 |
UA library record; WoS full record; WoS citing articles |
|
|
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Ariskin, D.A.; Schweigert, I.V.; Alexandrov, A.L.; Bogaerts, A.; Peeters, F.M. |
Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/C2H2 |
2009 |
Journal of applied physics |
105 |
21 |
UA library record; WoS full record; WoS citing articles |
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Bogaerts, A.; Yan, M.; Gijbels, R.; Goedheer, W. |
Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge |
1999 |
Journal of applied physics |
86 |
18 |
UA library record; WoS full record; WoS citing articles |
|
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Depla, D.; Chen, Z.Y.; Bogaerts, A.; Ignatova, V.; de Gryse, R.; Gijbels, R. |
Modeling of the target surface modification by reactive ion implantation during magnetron sputtering |
2004 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
22 |
13 |
UA library record; WoS full record; WoS citing articles |
|
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Wendelen, W.; Mueller, B.Y.; Autrique, D.; Bogaerts, A.; Rethfeld, B. |
Modeling ultrashort laser-induced emission from a negatively biased metal |
2013 |
Applied physics letters |
103 |
8 |
UA library record; WoS full record; WoS citing articles |
|
|
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Gou, F.; Neyts, E.; Eckert, M.; Tinck, S.; Bogaerts, A. |
Molecular dynamics simulations of Cl+ etching on a Si(100) surface |
2010 |
Journal of applied physics |
107 |
15 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Bogaerts, A.; Gijbels, R. |
Monte Carlo model for the argon ions and fast argon atoms in a radio-frequency discharge |
1999 |
IEEE transactions on plasma science |
27 |
15 |
UA library record; WoS full record; WoS citing articles |
|
|
|
Georgieva, V.; Bogaerts, A. |
Numerical simulation of dual frequency etching reactors: influence of the external process parameters on the plasma characteristics |
2005 |
Journal of applied physics |
98 |
75 |
UA library record; WoS full record; WoS citing articles |
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