|
Author |
Title |
Year |
Publication |
Volume |
Times cited |
Additional Links |
Links |
|
Vereecke, G.; De Coster, H.; Van Alphen, S.; Carolan, P.; Bender, H.; Willems, K.; Ragnarsson, L.-A.; Van Dorpe, P.; Horiguchi, N.; Holsteyns, F. |
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors |
2018 |
Microelectronic engineering |
200 |
|
UA library record; WoS full record; WoS citing articles |
|
|
Prabhakara, V.; Jannis, D.; Béché, A.; Bender, H.; Verbeeck, J. |
Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique |
2019 |
Semiconductor science and technology |
|
8 |
UA library record; WoS full record; WoS citing articles |
|
|
Prabhakara, V.; Jannis, D.; Guzzinati, G.; Béché, A.; Bender, H.; Verbeeck, J. |
HAADF-STEM block-scanning strategy for local measurement of strain at the nanoscale |
2020 |
Ultramicroscopy |
219 |
4 |
UA library record; WoS full record; WoS citing articles |
|
|
Prabhakara, V.; Nuytten, T.; Bender, H.; Vandervorst, W.; Bals, S.; Verbeeck, J. |
Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy |
2021 |
Optics Express |
29 |
2 |
UA library record; WoS full record; WoS citing articles |
|