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  Author Title Year Publication Volume Times cited Additional Links Links
Gijbels, R.; Bogaerts, A. Recent trends in solids mass spectrometry, with special emphasis on glow discharge mass spectrometry 1996 UA library record
Bogaerts, A.; Gijbels, R. Relative sensitivity factors in glow discharge mass spectrometry: the role of charge transfer ionization 1996 Journal of analytical atomic spectrometry 11 38 UA library record; WoS full record; WoS citing articles doi
Bogaerts, R.; de Keyser, A.; Herlach, F.; Peeters, F.M.; DeRosa, F.; Palmstrøm, C.J.; Brehmer, D.; Allen, S.J. Size effects in the transport properties of thin Sc1-xErxAs epitaxial layers buried in GaAs 1994 Solid state electronics 37 4 UA library record; WoS full record; WoS citing articles doi
Bogaerts, A.; Gijbels, R. Modelling of a direct current glow discharge: combined models for the electrons, argon ions and metastables 1995 UA library record
Bogaerts, A.; Gijbels, R. Modeling of metastable argon atoms in a direct current glow discharge 1995 Physical review : A : atomic, molecular and optical physics 52 98 UA library record; WoS full record; WoS citing articles url doi
Bogaerts, A.; Gijbels, R. The role of fast argon ions and atoms in the ionization of argon in a direct current glow discharge: a mathematical simulation 1995 Journal of applied physics 78 60 UA library record; WoS full record; WoS citing articles doi
Bogaerts, A.; Gijbels, R. Role of sputtered Cu atoms and ions in a direct current glow discharge: combined fluid and Monte Carlo model 1996 Journal of applied physics 79 81 UA library record; WoS full record; WoS citing articles doi
Bogaerts, A.; Aghaei, M. What modeling reveals about the properties of an inductively coupled plasma 2016 Spectroscopy 31 UA library record; WoS full record
Jian-Ping, N.; Xiao-Dan, L.; Cheng-Li, Z.; You-Min, Q.; Ping-Ni, H.; Bogaerts, A.; Fu-Jun, G. Molecular dynamics simulation of temperature effects on CF(3)(+) etching of Si surface 2010 Wuli xuebao 59 UA library record; WoS full record; WoS citing articles
Bogaerts, A.; Gijbels, R. Comprehensive three-dimensional modeling network for a dc glow discharge plasma 1998 Plasma physics reports 24 8 UA library record; WoS full record; WoS citing articles
Bogaerts, A.; Gijbels, R. Monte Carlo model for the argon ions and fast argon atoms in a radio-frequency discharge 1999 IEEE transactions on plasma science 27 15 UA library record; WoS full record; WoS citing articles doi
Berezhnoi, S.; Kaganovich, I.; Misina, M.; Bogaerts, A.; Gijbels, R. Semianalytical description of nonlocal secondary electrons in a radio-frequency capacitively coupled plasma at intermediate pressures 1999 IEEE transactions plasma science 27 7 UA library record; WoS full record; WoS citing articles doi
Yan, M.; Bogaerts, A.; Gijbels, R. Evolution of charged particle densities after laser-induced photodetachment in a strongly electronegative RF discharge 2002 IEEE transactions on plasma science 30 UA library record; WoS full record doi
Herrebout, D.; Bogaerts, A.; Gijbels, R.; Goedheer, W.J.; Vanhulsel, A. A one-dimensional fluid model for an acetylene rf discharge: a study of the plasma chemistry 2003 IEEE transactions on plasma science 31 26 UA library record; WoS full record; WoS citing articles doi
de Bleecker, K.; Bogaerts, A.; Goedheer, W.; Gijbels, R. Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model 2004 IEEE transactions on plasma science 32 29 UA library record; WoS full record; WoS citing articles doi
Kolev, I.; Bogaerts, A. Detailed numerical investigation of a DC sputter magnetron 2006 IEEE transactions on plasma science 34 28 UA library record; WoS full record; WoS citing articles doi
Chen, Z.Y.; Bogaerts, A.; Depla, D.; Ignatova, V. Dynamic Monte Carlo simulation for reactive sputtering of aluminium 2003 Nuclear instruments and methods in physics research: B 207 20 UA library record; WoS full record; WoS citing articles doi
Neyts, E.; Yan, M.; Bogaerts, A.; Gijbels, R. PIC-MC simulation of an RF capacitively coupled Ar/H2 discharge 2003 Nuclear instruments and methods in physics research: B 202 8 UA library record; WoS full record; WoS citing articles doi
Neyts, E.; Bogaerts, A.; Gijbels, R.; Benedikt, J.; van de Sanden, M.C.M. Molecular dynamics simulation of the impact behaviour of various hydrocarbon species on DLC 2005 Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms 228 19 UA library record; WoS full record; WoS citing articles doi
Bogaerts, A.; Chen, Z.; Gijbels, R. Glow discharge modelling: from basic understanding towards applications 2003 Surface and interface analysis 35 14 UA library record; WoS full record; WoS citing articles doi
Pietanza, L.D.; Guaitella, O.; Aquilanti, V.; Armenise, I.; Bogaerts, A.; Capitelli, M.; Colonna, G.; Guerra, V.; Engeln, R.; Kustova, E.; Lombardi, A.; Palazzetti, F.; Silva, T. Advances in non-equilibrium $$\hbox {CO}_2$$ plasma kinetics: a theoretical and experimental review 2021 European Physical Journal D 75 UA library record; WoS full record; WoS citing articles pdf url doi
Bogaerts, A.; Gijbels, R.; Grozeva, M.; Sabotinov, N. Investigation of laser output power saturation in the He-Cu+ IR hollow cathode discharge laser by experiments and numerical modeling 2003 Physica scripta T105 UA library record; WoS full record; WoS citing articles doi
Neyts, E.; Eckert, M.; Bogaerts, A. Molecular dynamics simulations of the growth of thin a-C:H films under additional ion bombardment: influence of the growth species and the Ar+ ion kinetic energy 2007 Chemical vapor deposition 13 14 UA library record; WoS full record; WoS citing articles doi
Eckert, M.; Neyts, E.; Bogaerts, A. Molecular dynamics simulations of the sticking and etch behavior of various growth species of (ultra)nanocrystalline diamond films 2008 Chemical vapor deposition 14 25 UA library record; WoS full record; WoS citing articles doi
Baguer, N.; Neyts, E.; van Gils, S.; Bogaerts, A. Study of atmospheric MOCVD of TiO2 thin films by means of computational fluid dynamics simulations 2008 Chemical vapor deposition 14 14 UA library record; WoS full record; WoS citing articles doi
Bogaerts, A.; Naylor, J.; Hatcher, M.; Jones, W.J.; Mason, R. Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: modeling and comparison with experiment 1998 Journal of vacuum science and technology: A: vacuum surfaces and films 16 12 UA library record; WoS full record; WoS citing articles doi
Depla, D.; Chen, Z.Y.; Bogaerts, A.; Ignatova, V.; de Gryse, R.; Gijbels, R. Modeling of the target surface modification by reactive ion implantation during magnetron sputtering 2004 Journal of vacuum science and technology: A: vacuum surfaces and films 22 13 UA library record; WoS full record; WoS citing articles doi
Liu, Y.-X.; Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. Electromagnetic effects in high-frequency large-area capacitive discharges : a review 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 10 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Y.-R.; Gao, F.; Li, X.-C.; Bogaerts, A.; Wang, Y.-N. Fluid simulation of the bias effect in inductive/capacitive discharges 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 9 UA library record; WoS full record; WoS citing articles url doi
Zhang, Y.-R.; Tinck, S.; De Schepper, P.; Wang, Y.-N.; Bogaerts, A. Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 3 UA library record; WoS full record; WoS citing articles url doi
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