Home
<<
1
>>
List View
|
Citations
|
Details
Author
Title
Year
Publication
Volume
Times cited
Additional Links
Ignatova, V.A.
;
Möller, W.
;
Conard, T.
;
Vandervorst, W.
;
Gijbels, R.
Interpretation of TOF-SIMS depth profiles from ultrashallow high-
k
dielectric stacks assisted by hybrid collisional computer simulation
2005
Applied physics A : materials science & processing
81
4
UA library record
;
WoS full record
;
WoS citing articles
Ignatova, V.A.
;
Conard, T.
;
Möller, W.
;
Vandervorst, W.
;
Gijbels, R.
Depth profiling of ZrO
2
/SiO
2
/Si stacks : a TOF-SIMS and computer simulation study
2004
Applied surface science
231/232
4
UA library record
;
WoS full record
;
WoS citing articles
