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	Author	Suvorov, A.V.; Lebedev, O.I.; Suvorova, A.A.; van Landuyt, J.; Usov, I.O.
	Title	Defect characterization in high temperature implanted 6H-SiC using TEM			Type	A1 Journal article
	Year	1997	Publication	Nuclear instruments and methods in physics research: B	Abbreviated Journal	Nucl Instrum Meth B
	Volume	127/128	Issue		Pages	347-349
	Keywords	A1 Journal article; Electron microscopy for materials research (EMAT)
	Abstract
	Address
	Corporate Author				Thesis
	Publisher		Place of Publication		Editor
	Language		Wos	A1997XG60500078	Publication Date	2002-07-25
	Series Editor		Series Title		Abbreviated Series Title
	Series Volume		Series Issue		Edition
	ISSN	0168-583X;	ISBN		Additional Links	UA library record; WoS full record; WoS citing articles
	Impact Factor	1.109	Times cited	17	Open Access
	Notes				Approved	Most recent IF: 1.109; 1997 IF: 1.016
	Call Number	UA @ lucian @ c:irua:21411			Serial	613
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