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Author |
Khan, A.W.; Jan, F.; Saeed, A.; Zaka-ul-Islam, M.; Abrar, M.; Khattak, N.A.D.; Zakaullah, M. |
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Title |
Comparative study of electron temperature and excitation temperature in a magnetic pole enhanced-inductively coupled argon plasma |
Type |
A1 Journal article |
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Year  |
2013 |
Publication |
Current applied physics |
Abbreviated Journal |
Curr Appl Phys |
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Volume |
13 |
Issue |
7 |
Pages |
1241-1246 |
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Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
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Abstract |
Magnetic Pole Enhanced-Inductively Coupled Plasmas (MaPE-ICPs) in analogy to the conventional ICPs exhibit two modes of operation, depending on the power coupling mechanism, i.e., a low power mode with dominant capacitive coupling (E-mode) and a high power mode with dominant inductive coupling (H-mode). A comparative study of the electron temperature measured by a Langmuir probe (T-e(LP)) and the electron excitation temperature (T-exc(OES)) determined by Optical Emission Spectroscopy (OES) is reported in the two distinct modes of a MaPE-ICP operated in argon. The dependence of T-e(LP), T-exc(OES) and their ratio (T-e(LP)/T-exc(OES)) on applied power (5-50 W) and gas pressure (15-60 mTorr) is explored, and the validity of T-exc(OES) as an alternative diagnostic to T-e(LP) is tested in the two modes of MaPE-ICP. The OES based non-invasive measurement of the plasma parameters such as electron temperature is very useful for plasma processing applications in which probe measurements are limited. (C) 2013 Elsevier B. V. All rights reserved. |
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Place of Publication |
Amsterdam |
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Wos |
000322631400014 |
Publication Date |
2013-04-17 |
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Edition |
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ISSN |
1567-1739; |
ISBN |
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Additional Links |
UA library record; WoS full record; WoS citing articles |
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Impact Factor |
1.971 |
Times cited |
13 |
Open Access |
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Notes |
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Approved |
Most recent IF: 1.971; 2013 IF: 2.026 |
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Call Number |
UA @ lucian @ c:irua:110718 |
Serial |
421 |
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