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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Zhao, S.-X.; Gao, F.; Wang, Y.-P.; Wang, Y.-N.; Bogaerts, A. Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma 2015 Journal of applied physics 118 1 UA library record; WoS full record; WoS citing articles pdf url doi
Zhao, S.-X.; Zhang, Y.-R.; Gao, F.; Wang, Y.-N.; Bogaerts, A. Bulk plasma fragmentation in a C4F8 inductively coupled plasma : a hybrid modelling study 2015 Journal of applied physics 117 11 UA library record; WoS full record; WoS citing articles url doi
Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma 2013 Plasma sources science and technology 22 11 UA library record; WoS full record; WoS citing articles pdf doi
Fei, G.; Xue-Chun, L.; Zhao, S.-X.; You-Nian, W. Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition 2012 Chinese physics B 21 11 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Q.-Z.; Zhao, S.-X.; Jiang, W.; Wang, Y.-N. Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas 2012 Journal of physics: D: applied physics 45 20 UA library record; WoS full record; WoS citing articles pdf doi
Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. The effect of F2 attachment by low-energy electrons on the electron behaviour in an Ar/CF4 inductively coupled plasma 2012 Plasma sources science and technology 21 23 UA library record; WoS full record; WoS citing articles pdf doi
Si, X.-J.; Zhao, S.-X.; Xu, X.; Bogaerts, A.; Wang, Y.-N. Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma 2011 Physics of plasmas 18 7 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Y.-R.; Xu, X.; Zhao, S.-X.; Bogaerts, A.; Wang, Y.-N. Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas 2010 Physics of plasmas 17 30 UA library record; WoS full record; WoS citing articles pdf doi
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