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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Xiaoyan, S.; Zhang, Y.-R.; Wang, Y.-N.; He, J.-X. Fluid simulation of the superimposed dual-frequency source effect in inductively coupled discharges 2021 Physics Of Plasmas 28 UA library record; WoS full record doi
Liang, Y.-S.; Xue, C.; Zhang, Y.-R.; Wang, Y.-N. Investigation of active species in low-pressure capacitively coupled N-2/Ar plasmas 2021 Physics Of Plasmas 28 UA library record; WoS full record; WoS citing articles doi
Liang, Y.-S.; Liu, Y.-X.; Zhang, Y.-R.; Wang, Y.-N. Investigation of voltage effect on reaction mechanisms in capacitively coupled N-2 discharges 2020 Journal Of Applied Physics 127 UA library record; WoS full record; WoS citing articles pdf doi
Sun, J.-Y.; Wen, D.-Q.; Zhang, Q.-Z.; Liu, Y.-X.; Wang, Y.-N. The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials 2019 Physics of plasmas 26 1 UA library record; WoS full record; WoS citing articles url doi
Wang, L.; Wen, D.-Q.; Zhang, Q.-Z.; Song, Y.-H.; Zhang, Y.-R.; Wang, Y.-N. Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges 2019 Plasma sources science and technology 28 2 UA library record; WoS full record; WoS citing articles pdf url doi
Jia, W.-Z.; Zhang, Q.-Z.; Wang, X.-F.; Song, Y.-H.; Zhang, Y.-Y.; Wang, Y.-N. Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma 2019 Journal of physics: D: applied physics 52 UA library record; WoS full record; WoS citing articles pdf url doi
Zhang, Y.-R.; Gao, F.; Li, X.-C.; Bogaerts, A.; Wang, Y.-N. Fluid simulation of the bias effect in inductive/capacitive discharges 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 9 UA library record; WoS full record; WoS citing articles url doi
Zhao, S.-X.; Gao, F.; Wang, Y.-P.; Wang, Y.-N.; Bogaerts, A. Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma 2015 Journal of applied physics 118 1 UA library record; WoS full record; WoS citing articles pdf url doi
Zhao, S.-X.; Zhang, Y.-R.; Gao, F.; Wang, Y.-N.; Bogaerts, A. Bulk plasma fragmentation in a C4F8 inductively coupled plasma : a hybrid modelling study 2015 Journal of applied physics 117 11 UA library record; WoS full record; WoS citing articles url doi
Liu, Y.-X.; Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. Electromagnetic effects in high-frequency large-area capacitive discharges : a review 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 10 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Y.-R.; Tinck, S.; De Schepper, P.; Wang, Y.-N.; Bogaerts, A. Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 3 UA library record; WoS full record; WoS citing articles url doi
Wen, D.-Q.; Zhang, Q.-Z.; Jiang, W.; Song, U.-H.; Bogaerts, A.; Wang, Y.-N. Phase modulation in pulsed dual-frequency capacitively coupled plasmas 2014 Journal of applied physics 115 8 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Q.-Z.; Wang, Y.-N.; Bogaerts, A. Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF4 discharge 2014 Journal of applied physics 115 9 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Q.-Z.; Liu, Y.-X.; Jiang, W.; Bogaerts, A.; Wang, Y.-N. Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas 2013 Plasma sources science and technology 22 9 UA library record; WoS full record; WoS citing articles pdf doi
Liu, Y.-X.; Zhang, Q.-Z.; Liu, L.; Song, Y.-H.; Bogaerts, A.; Wang, Y.-N. Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges 2013 Plasma sources science and technology 22 20 UA library record; WoS full record; WoS citing articles pdf doi
Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma 2013 Plasma sources science and technology 22 11 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. Fluid simulation of the phase-shift effect in Ar/CF4 capacitively coupled plasmas 2012 Journal of physics: D: applied physics 45 8 UA library record; WoS full record; WoS citing articles pdf doi
Liu, Y.-X.; Zhang, Q.-Z.; Liu, J.; Song, Y.-H.; Bogaerts, A.; Wang, Y.-N. Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas 2012 Applied physics letters 101 26 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Q.-Z.; Zhao, S.-X.; Jiang, W.; Wang, Y.-N. Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas 2012 Journal of physics: D: applied physics 45 20 UA library record; WoS full record; WoS citing articles pdf doi
Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. The effect of F2 attachment by low-energy electrons on the electron behaviour in an Ar/CF4 inductively coupled plasma 2012 Plasma sources science and technology 21 23 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Y.-R.; Xu, X.; Bogaerts, A.; Wang, Y.-N. Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: 2 : radial uniformity of the plasma characteristics 2012 Journal of physics: D: applied physics 45 15 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Y.-R.; Xu, X.; Bogaerts, A.; Wang, Y.-N. Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: 1 : transient behaviour of electrodynamics and power deposition 2012 Journal of physics: D: applied physics 45 57 UA library record; WoS full record; WoS citing articles pdf doi
Si, X.-J.; Zhao, S.-X.; Xu, X.; Bogaerts, A.; Wang, Y.-N. Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma 2011 Physics of plasmas 18 7 UA library record; WoS full record; WoS citing articles pdf doi
Zhang, Y.-R.; Xu, X.; Zhao, S.-X.; Bogaerts, A.; Wang, Y.-N. Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas 2010 Physics of plasmas 17 30 UA library record; WoS full record; WoS citing articles pdf doi
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