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	“Stress analysis with convergent beam electron diffraction around NMOS transistors”. Stuer G, Bender H, van Landuyt J, Eyben P, , 359 (2001) Keywords: P1 Proceeding; Electron microscopy for materials research (EMAT); Internet Data Lab (IDLab) Additional Links: UA library record; WoS full record; Permanent link \| Save citation: RTF PDF LaTeX \| Export record: BibTeX Endnote ISI RIS Word XML

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