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“Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy”. Hens S, van Landuyt J, Bender H, Boullart W, Vanhaelemeersch S, Materials science in semiconductor processing 4, 109 (2001). http://doi.org/10.1016/S1369-8001(00)00147-5
Abstract: The use of an energy-filtering held emission gun transmission electron microscope (CM30 FEG Ultratwin) allows, apart from imaging morphologies down to nanometer scale, the fast acquisition of high-resolution element distributions. Electrons that have lost energy corresponding to characteristic inner-shell loss edges are used to form the element maps. The production of Ultra Large-Scale Integration (ULSI) devices with dimensions below 0.25 mum requires among others the formation of a multilayer metallization scheme by means of repeatedly applying the deposition and etching of dielectrics and metals. In this work the evolution of the surface chemical species on etched Al lines in a post-etch cleaning process has been investigated by energy filtering transmission electron microscopy, with the aim to understand the role of each process step on the removal of the etching residues. (C) 2001 Elsevier Science Ltd. All rights reserved.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Impact Factor: 2.359
DOI: 10.1016/S1369-8001(00)00147-5
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“Synthesis, crystal structure, and magnetic properties of a novel layered manganese oxide Sr2MnGaO5+\delta”. Abakumov AM, Rozova MG, Pavlyuk BP, Lobanov MV, Antipov EV, Lebedev OI, Van Tendeloo G, Ignatchik OL, Ovtchenkov EA, Koksharov YA, Vasil'ev AN, Journal of solid state chemistry 160, 353 (2001). http://doi.org/10.1006/jssc.2001.9240
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 46
DOI: 10.1006/jssc.2001.9240
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“The fine structure of YCuO2+x delafossite determined by synchrotron powder diffraction and electron microscopy”. Van Tendeloo G, Garlea O, Darie C, Bougerol-Chaillout C, Bordet P, Journal of solid state chemistry 156, 428 (2001). http://doi.org/10.1006/jssc.2000.9018
Abstract: YCuO2 delafossite crystallizes into two stacking variants; hexagonal 2H or rhombohedral 3R, depending on the preparation conditions. The structure of the fully oxygenated material YCuO2.50 has been determined as orthorhombic (a(O) = 6.1961 Angstrom; b(O) = 11.2158 Angstrom; c(O) = 7.1505 Angstrom; space group Pnma). The structure is based on the hexagonal 2H structure (a(O) = a(H)root3; b(O) = c(H); c(O) = 2a(H)). Upon incomplete oxidation, a different YCuOZ phase with ideal composition YCuO2.33 and lattice parameters a(H root)3, a(H)root3, c(H) is also formed. Diffraction patterns are often very complex because of the presence of planar defects and intergrowth of both phases. Under electron beam irradiation, oxygen is released from the structure and one phase gradually transforms into the other. (C) 2001 Academic Press.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 33
DOI: 10.1006/jssc.2000.9018
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“Evolution of crystallographic phases in (Sr1-xCax)TiO3 with composition (x)”. Ranjan R, Pandey D, Schuddinck W, Richard O, De Meulenaere P, van Landuyt J, Van Tendeloo G, Journal of solid state chemistry 162, 20 (2001). http://doi.org/10.1006/jssc.2001.9336
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 45
DOI: 10.1006/jssc.2001.9336
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“The real (incommensurate interface modulated) structure of Ni6\pm xSe5”. Norén L, Van Tendeloo G, Withers RL, Journal of solid state chemistry 162, 122 (2001). http://doi.org/10.1006/jssc.2001.9365
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 4
DOI: 10.1006/jssc.2001.9365
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“An electron and X-ray diffraction investigation of Ni1+xTe2 and Ni1+xSe2CdI2/NiAs type solid solution phases”. Norén L, Ting V, Withers RL, Van Tendeloo G, Journal of solid state chemistry 161, 266 (2001). http://doi.org/10.1006/jssc.2001.9309
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 14
DOI: 10.1006/jssc.2001.9309
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“Synthesis and crystal structure of Sr2ScBiO6”. Kazin PE, Abakumov AM, Zaytsev DD, Tretyakov YD, Khasanova NR, Van Tendeloo G, Jansen M, Journal of solid state chemistry 162, 142 (2001). http://doi.org/10.1006/jssc.2001.9375
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 3
DOI: 10.1006/jssc.2001.9375
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“HREM study of fluorinated Nd2CuO4”. Hadermann J, Van Tendeloo G, Abakumov AM, Rozova MG, Antipov EV, Journal of solid state chemistry 157, 56 (2001). http://doi.org/10.1006/jssc.2000.9038
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 7
DOI: 10.1006/jssc.2000.9038
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“Suppression of modulations in fluorinated Bi-2201 phases”. Hadermann J, Khasanova NR, Van Tendeloo G, Abakumov AM, Rozova MG, Alekseeva AM, Antipov EV, Journal of solid state chemistry 156, 445 (2001). http://doi.org/10.1006/jssc.2000.9020
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 8
DOI: 10.1006/jssc.2000.9020
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“Synthesis and crystal structure of novel layered manganese oxide Ca2MnGaO5+\delta”. Abakumov AM, Rozova MG, Pavlyuk BP, Lobanov MV, Antipov EV, Lebedev OI, Van Tendeloo G, Sheptyakov DV, Balagurov AM, Bourée F, Journal of solid state chemistry 158, 100 (2001). http://doi.org/10.1006/jssc.2000.9105
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 48
DOI: 10.1006/jssc.2000.9105
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“Crystal structure and magnetic properties of novel reduced V(IV)-based oxide Pb2V5O12”. Shpanchenko RV, Chyornaya VV, Abakumov AM, Antipov EV, Hadermann J, Van Tendeloo G, Kaul E, Geibel C, Sheptyakov D, Balagurov AM, Zeitschrift für anorganische und allgemeine Chemie 627, 2143 (2001). http://doi.org/10.1002/1521-3749(200109)627:9<2143::AID-ZAAC2143>3.0.CO;2-R
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.144
Times cited: 4
DOI: 10.1002/1521-3749(200109)627:9<2143::AID-ZAAC2143>3.0.CO;2-R
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“Structure determination of spherical MCM-41 particles”. Pauwels B, Van Tendeloo G, Thoelen C, van Rhijn W, Jacobs PA, Advanced materials 13, 1317 (2001). http://doi.org/10.1002/1521-4095(200109)13:17<1317::AID-ADMA1317>3.0.CO;2-5
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 19.791
Times cited: 91
DOI: 10.1002/1521-4095(200109)13:17<1317::AID-ADMA1317>3.0.CO;2-5
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“Structural and chemical effects on EELS L3,2 ionization edges in Ni-based intermetallic compounds”. Potapov PL, Kulkova SE, Schryvers D, Verbeeck J, Physical review : B : condensed matter and materials physics 64, 184110 (2001). http://doi.org/10.1103/PhysRevB.64.184110
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.836
Times cited: 44
DOI: 10.1103/PhysRevB.64.184110
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“Transmission electron microscopy and Monte Carlo simulations of ordering in Au-Cu clusters produced in a laser vaporization source”. Pauwels B, Van Tendeloo G, Zhurkin E, Hou M, Verschoren G, Kuhn LT, Bouwen W, Lievens P, Physical review : B : condensed matter and materials physics 63, 165406 (2001). http://doi.org/10.1103/PhysRevB.63.165406
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.836
Times cited: 64
DOI: 10.1103/PhysRevB.63.165406
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“Strong enhancement of superconductivity in a nanosized Pb bridge”. Misko VR, Fomin VM, Devreese JT, Physical Review B 64, 014517 (2001). http://doi.org/10.1103/PhysRevB.64.014517
Keywords: A1 Journal article; Electron Microscopy for Materials Science (EMAT);
Impact Factor: 3.836
Times cited: 28
DOI: 10.1103/PhysRevB.64.014517
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“Evidence for another low-temperature phase transition in tetragonal Pb(ZrxTi1-x)O3 (x=0.515,0.520)”. Mishra RSK, Pandey D, Lemmens H, Van Tendeloo G, Physical review : B : condensed matter and materials physics 64, 054104 (2001). http://doi.org/10.1103/PhysRevB.64.054101
Abstract: Results of dielectric and resonance frequency (f(r)) measurements below room temperature are presented for Pb(ZrxTi1-x)O-3, x = 0.515 and 0.520. It is shown that the temperature coefficient of f(r) changes sign from negative to positive around 210 and 265 K for x = 0.520 and 200 and 260 K for x = 0.515. Anomalies in the real part of the dielectric constant (epsilon') are observed around the same temperatures at which the temperature coefficient of f(r) changes sign because of the electrostrictive coupling between the elastic and dielectric responses. Low-temperature powder x-ray-diffraction (XRD) data, however, reveal only one transition from the tetragonal to monoclinic phase similar to that reported by Noheda et al. [Phys. Rev. B, 61, 8687 (2000)]. Electron-diffraction data, on the other hand, reveal yet another structural transition at lower temperatures corresponding to the second anomaly in the epsilon' vs T and f(r) vs T curves. This second transition is shown to be a cell-doubling transition not observed by Noheda et al. in their XRD studies. The observation of superlattice reflections raises doubts about the correctness of the Cm space group proposed by Noheda et al. for the monoclinic phase of Pb(ZrxTi(1-x))O-3 below the second transition temperature.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.836
DOI: 10.1103/PhysRevB.64.054101
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“Particle layering in the ceramic-metal thin film Pt-Al2O3”. Gibaud A, Hazra S, Sella C, Laffez P, Désert A, Naudon A, Van Tendeloo G, Physical review : B : condensed matter and materials physics 63, 193407 (2001). http://doi.org/10.1103/PhysRevB.63.193407
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.836
Times cited: 25
DOI: 10.1103/PhysRevB.63.193407
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“Electron diffraction study of small bundles of single-wall carbon nanotubes with unique helicity”. Colomer J-F, Henrard L, Lambin P, Van Tendeloo G, Physical review : B : condensed matter and materials physics 64, 125425 (2001). http://doi.org/10.1103/PhysRevB.64.125425
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.836
Times cited: 31
DOI: 10.1103/PhysRevB.64.125425
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“Bending martensite needles in Ni65Al35 investigated by two-dimensional elasticity and high-resolution transmission electron microscopy”. Boullay P, Schryvers D, Kohn RV, Physical review : B : condensed matter and materials physics 64, 144105 (2001). http://doi.org/10.1103/PhysRevB.64.144105
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.836
Times cited: 18
DOI: 10.1103/PhysRevB.64.144105
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“Electron energy-loss spectroscopy study of a (LaMnO3)8(SrMnO3)4 heterostructure”. Verbeeck J, Lebedev OI, Van Tendeloo G, Silcox J, Mercey B, Hervieu M, Haghiri-Gosnet AM, Applied physics letters 79, 2037 (2001). http://doi.org/10.1063/1.1403316
Abstract: An epitaxially grown heterostructure consisting of alternating layers of LaMnO3 (8 unit cells) and SrMnO3 (4 unit cells) on a SrTiO3 substrate has been studied by a combination of electron energy-loss spectroscopy (EELS) and high-resolution transmission electron microscopy (HRTEM) on an atomic scale. Excitation edges of all elements are captured with subnanometer spatial accuracy, and parametrized to obtain chemical profiles. The fine-edge structure of O K and Mn L-2,L-3 edges are interpreted as signatures of the local electronic structure and show a spatial modulation of the concentration of holes with O 2p character. The chemical concentration is found to be different for the bottom and top interface of a SrMnO3 layer. HRTEM complements the EELS results and confirms the asymmetry of the interfaces. (C) 2001 American Institute of Physics.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.411
Times cited: 19
DOI: 10.1063/1.1403316
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“In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines”. Teodorescu V, Nistor L, Bender H, Steegen A, Lauwers A, Maex K, van Landuyt J, Journal of applied physics 90, 167 (2001). http://doi.org/10.1063/1.1378812
Abstract: The formation of Ni silicides is studied by transmission electron microscopy during in situ heating experiments of 12 nm Ni layers on blanket silicon, or in patterned structures covered with a thin chemical oxide. It is shown that the first phase formed is the NiSi2 which grows epitaxially in pyramidal crystals. The formation of NiSi occurs quite abruptly around 400 degreesC when a monosilicide layer covers the disilicide grains and the silicon in between. The NiSi phase remains stable up to 800 degreesC, at which temperature the layer finally fully transforms to NiSi2. The monosilicide grains show different epitaxial relationships with the Si substrate. Ni2Si is never observed. (C) 2001 American Institute of Physics.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.068
Times cited: 97
DOI: 10.1063/1.1378812
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“Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures”. Stuer C, van Landuyt J, Bender H, de Wolf I, Rooyackers R, Badenes G, Journal of the electrochemical society 148, G597 (2001). http://doi.org/10.1149/1.1404970
Abstract: Convergent beam electron diffraction (CBED) is used in this study to investigate the stress distribution around shallow trench isolation (STI) structures. Attention is given to the influence of the different processing parameters and the width and spacing of the structures. The use of a wet or a dry pregate oxidation is found to have a strong influence on the stress behavior. Isolated lines show more stress, leading to the formation of defects in the silicon substrate if a wet pregate oxidation is used. The CBED analyses are compared with micro-Raman and bright-field transmission electron microscopy measurements. (C) 2001 The Electrochemical Society.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.259
Times cited: 13
DOI: 10.1149/1.1404970
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“Growth kinetic of MgO film on r-plane of sapphire: microstructural study”. Lei CH, Van Tendeloo G, Lisoni JG, Siegert M, Schubert J, Journal of crystal growth 226, 419 (2001). http://doi.org/10.1016/S0022-0248(01)01396-3
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.751
Times cited: 7
DOI: 10.1016/S0022-0248(01)01396-3
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“Structure and properties of the YBa2Cu3O7-x/LaAlO3 superlattices”. Lebedev OI, Hamet JF, Van Tendeloo G, Beaumont V, Raveau B, Journal of applied physics 90, 5261 (2001). http://doi.org/10.1063/1.1406963
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.068
Times cited: 13
DOI: 10.1063/1.1406963
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“Extracellular matrix protein 1 (ECM1) has angiogenic properties and is expressed by breast tumor cells”. Han Z, Ni J, Smits P, Underhill C, Xie B, Chen Y, Liu N, Tylzanowski P, Parmelee D, Feng P, Ding I, Gao F, Gentz R, Huylebroeck D, Merregaert J, Zhang L, The FASEB journal 15, 988 (2001). http://doi.org/10.1096/fj.99-0934com
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Times cited: 94
DOI: 10.1096/fj.99-0934com
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“Influence of the morphology on the magneto-transport properties of laser-ablated ultrathin La0.7Ba0.3MnO3 films”. Das A, Gordon I, Wagner P, Cannaerts M, Moshchalkov VV, Bruynseraede Y, Schuddinck W, Van Tendeloo G, Borghs G, Journal of applied physics 90, 1429 (2001). http://doi.org/10.1063/1.1380217
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.068
Times cited: 2
DOI: 10.1063/1.1380217
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“Why are sputter deposited Nd1+xBa2-xCu3O7-\delta thin films flatter than NdBa2Cu3O7-\delta films?”.Bals S, Van Tendeloo G, Salluzzo M, Maggio-Aprile I, Applied physics letters 79, 3660 (2001). http://doi.org/10.1063/1.1421622
Abstract: High-resolution electron microscopy and scanning tunneling microscopy have been used to compare the microstructure of NdBa2Cu3O7-delta and Nd1+xBa2-xCu3O7-delta thin films. Both films contain comparable amounts of Nd2CuO4 inclusions. Antiphase boundaries are induced by unit cell high steps at the substrate or by a different interface stacking. In Nd1+xBa2-xCu3O7-delta the antiphase boundaries tend to annihilate by the insertion of extra Nd layers. Stacking faults, which can be characterized as local Nd2Ba2Cu4O9 inclusions, also absorb the excess Nd. A correlation is made between the excess Nd and the absence of growth spirals at the surface of the Nd-rich films. (C) 2001 American Institute of Physics.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.411
Times cited: 13
DOI: 10.1063/1.1421622
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“TEM of ultra-thin DyBa2Cu3O7-x films deposited on TiO2 terminated SrTiO3”. Bals S, Rijnders G, Blank DHA, Van Tendeloo G, Physica: C : superconductivity 355, 225 (2001). http://doi.org/10.1016/S0921-4534(01)00034-X
Abstract: Using pulsed laser deposition ultra-thin DyBa2Cu3O7-x films were deposited on a single terminated (0 0 1) SrTiOr(3) substrate. The initial growth was studied by high-resolution electron microscopy. Two different types of interface arrangements occur and were determined as: bulk-SrO-TiO2-BaO-CuO-BaO-CuO2-Dy-CuO2-BaO bulk and bulk-SrO-TiO2-BaO-CuO2-Dy-CuO2-BaO-CuO-BaO-bulk This variable growth sequence causes structural shifts, resulting in antiphase boundaries with displacement vector R = [0 0 1/3]. as well as local chemical variations. (C) 2001 Elsevier Science B.V. All rights reserved.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.404
Times cited: 26
DOI: 10.1016/S0921-4534(01)00034-X
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“Structure of the hexagonal 16l perovskites Ba4Ca0.9Mn3.1O11.3 and Ba4Ca0.5Mn3Cu0.5O12-\delta by high-resolution electron microscopy”. Schuddinck W, Van Tendeloo G, Hervieu M, Floros N, Raveau B, Materials research bulletin 36, 2689 (2001). http://doi.org/10.1016/S0025-5408(01)00744-9
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.446
Times cited: 4
DOI: 10.1016/S0025-5408(01)00744-9
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“Phase transformations and precipitation in amorphous Ti50Ni25Cu25 ribbons”. Satto C, Ledda A, Potapov P, Janssens JF, Schryvers D, Intermetallics 9, 395 (2001). http://doi.org/10.1016/S0966-9795(01)00015-2
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.14
Times cited: 16
DOI: 10.1016/S0966-9795(01)00015-2
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