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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Zhang, Y.-R.; Tinck, S.; De Schepper, P.; Wang, Y.-N.; Bogaerts, A. Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 3 UA library record; WoS full record; WoS citing articles url doi
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