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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Tinck, S.; Boullart, W.; Bogaerts, A. Simulation of an Ar/Cl2 inductively coupled plasma: study of the effect of bias, power and pressure and comparison with experiments 2008 Journal of physics: D: applied physics 41 31 UA library record; WoS full record; WoS citing articles doi
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