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Author |
Chen, Z.Y.; Bogaerts, A.; Depla, D.; Ignatova, V. |
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Title |
Dynamic Monte Carlo simulation for reactive sputtering of aluminium |
Type |
A1 Journal article |
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Year  |
2003 |
Publication |
Nuclear instruments and methods in physics research: B |
Abbreviated Journal |
Nucl Instrum Meth B |
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Volume |
207 |
Issue |
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Pages |
415-423 |
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Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
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Wos |
000184051300006 |
Publication Date |
2003-03-25 |
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Series Editor |
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Series Volume |
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Series Issue |
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Edition |
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ISSN |
0168-583X; |
ISBN |
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Additional Links |
UA library record; WoS full record; WoS citing articles |
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Impact Factor |
1.109 |
Times cited |
20 |
Open Access |
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Notes |
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Approved |
Most recent IF: 1.109; 2003 IF: 1.041 |
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Call Number |
UA @ lucian @ c:irua:44016 |
Serial |
762 |
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Author |
Neyts, E.; Yan, M.; Bogaerts, A.; Gijbels, R. |
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Title |
PIC-MC simulation of an RF capacitively coupled Ar/H2 discharge |
Type |
A1 Journal article |
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Year |
2003 |
Publication |
Nuclear instruments and methods in physics research: B |
Abbreviated Journal |
Nucl Instrum Meth B |
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Volume |
202 |
Issue |
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Pages |
300-304 |
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Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
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Wos |
000182122500048 |
Publication Date |
2003-03-26 |
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Series Volume |
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Series Issue |
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Edition |
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ISSN |
0168-583X; |
ISBN |
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Additional Links |
UA library record; WoS full record; WoS citing articles |
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Impact Factor |
1.109 |
Times cited |
8 |
Open Access |
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Notes |
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Approved |
Most recent IF: 1.109; 2003 IF: 1.041 |
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Call Number |
UA @ lucian @ c:irua:44015 |
Serial |
2620 |
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Author |
Suvorov, A.V.; Lebedev, O.I.; Suvorova, A.A.; van Landuyt, J.; Usov, I.O. |
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Title |
Defect characterization in high temperature implanted 6H-SiC using TEM |
Type |
A1 Journal article |
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Year |
1997 |
Publication |
Nuclear instruments and methods in physics research: B |
Abbreviated Journal |
Nucl Instrum Meth B |
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Volume |
127/128 |
Issue |
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Pages |
347-349 |
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Keywords |
A1 Journal article; Electron microscopy for materials research (EMAT) |
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Wos |
A1997XG60500078 |
Publication Date |
2002-07-25 |
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Series Issue |
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Edition |
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ISSN |
0168-583X; |
ISBN |
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Additional Links |
UA library record; WoS full record; WoS citing articles |
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Impact Factor |
1.109 |
Times cited |
17 |
Open Access |
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Notes |
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Approved |
Most recent IF: 1.109; 1997 IF: 1.016 |
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Call Number |
UA @ lucian @ c:irua:21411 |
Serial |
613 |
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