| Author |
Title |
Year  |
Publication |
Volume |
Times cited |
Additional Links |
| Chen, Z.Y.; Bogaerts, A.; Depla, D.; Ignatova, V. |
Dynamic Monte Carlo simulation for reactive sputtering of aluminium |
2003 |
Nuclear instruments and methods in physics research: B |
207 |
20 |
UA library record; WoS full record; WoS citing articles |
| Neyts, E.; Yan, M.; Bogaerts, A.; Gijbels, R. |
PIC-MC simulation of an RF capacitively coupled Ar/H2 discharge |
2003 |
Nuclear instruments and methods in physics research: B |
202 |
8 |
UA library record; WoS full record; WoS citing articles |
| Suvorov, A.V.; Lebedev, O.I.; Suvorova, A.A.; van Landuyt, J.; Usov, I.O. |
Defect characterization in high temperature implanted 6H-SiC using TEM |
1997 |
Nuclear instruments and methods in physics research: B |
127/128 |
17 |
UA library record; WoS full record; WoS citing articles |
