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Author Cheng, K.; Degroote, S.; Leys, M.; van Daele, B.; Germain, M.; Van Tendeloo, G.; Borghs, G.
Title Single crystalline GaN grown on porous Si(111) by MOVPE Type P1 Proceeding
Year (down) 2007 Publication Physica status solidi: C: conferences and critical reviews Abbreviated Journal
Volume 4 Issue 6 Pages 1908-1912
Keywords P1 Proceeding; Electron microscopy for materials research (EMAT)
Abstract In this work, GaN growth on porous Si(111) will be reported. The porosity of the substrates was 30% or 50%. In the latter case, various thicknesses, from 0.6 mu m to 10 mu m, were investigated. The morphology of the GaN surfaces was analyzed by optical interference microscopy. The crystalline quality of the epitaxial layers was characterized by High Resolution X-Ray Diffraction (HR-XRD) and cross-sectional Transmission Electron Microscopy (TEM). A Full Width at Half Maximum (FWHM) of the X-ray symmetric rocking curve (0002) 2 theta – omega scan of 290 arc see was obtained for a 1 mu m thick GaN layer, which is comparable with that of GaN grown on bulk Si(111) substrates. (c) 2007 WILEY-VCH Verlag GmbH Co. KGaA, Weinheim.
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Corporate Author Thesis
Publisher Place of Publication Berlin Editor
Language Wos 000247421800020 Publication Date 2007-05-27
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 1610-1634;1610-1642; ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor Times cited 2 Open Access
Notes Approved Most recent IF: NA
Call Number UA @ lucian @ c:irua:94664 Serial 3019
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