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| Author | Montoya, E.; Bals, S.; Rossell, M.D.; Schryvers, D.; Van Tendeloo, G. | ||||
| Title | Evaluation of top, angle, and side cleaned FIB samples for TEM analysis | Type | A1 Journal article | ||
Year  |
2007 | Publication | Microscopy research and technique | Abbreviated Journal | Microsc Res Techniq |
| Volume | 70 | Issue | 12 | Pages | 1060-1071 |
| Keywords | A1 Journal article; Electron microscopy for materials research (EMAT) | ||||
| Abstract | ITEM specimens of a LaAlO3/SrTiO3 multilayer are prepared by FIB with internal lift out. Using a Ga+1 beam of 5 kV, a final cleaning step yielding top, top-angle, side, and bottom-angle cleaning is performed. Different cleaning procedures, which can be easily implemented in a dual beam FIB system, are described and compared; all cleaning types produce thin lamellae, useful for HRTEM and HAADF-STEM work up to atomic resolution. However, the top cleaned lamellae are strongly affected by the curtain effect. Top-angle cleaned specimens show an amorphous layer of around 5 nm at the specimen surfaces, due to damage and redeposition. Furthermore, it is observed that the LaAlO3 layers are preferentially destroyed and transformed into amorphous material, during the thinning process. | ||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | Place of Publication | New York, N.Y. | Editor | ||
| Language | Wos | 000251868200008 | Publication Date | 2007-08-25 | |
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | 1059-910X;1097-0029; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
| Impact Factor | 1.147 | Times cited | 36 | Open Access | |
| Notes | Aip; Fwo | Approved | Most recent IF: 1.147; 2007 IF: 1.644 | ||
| Call Number | UA @ lucian @ c:irua:67282 | Serial | 1090 | ||
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