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\bibitem{Yan_etal2000} {\textquotedblleft}\textit{Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative SiH$_{4}$ discharges}{\textquotedblright}. Yan M, Bogaerts A, Goedheer WJ, Gijbels R, Plasma sources science and technology \textbf{9}, 583 (2000).   http://doi.org/10.1088/0963-0252/9/4/314

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