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\bibitem{Suvorov_etal1997} {\textquotedblleft}\textit{Defect characterization in high temperature implanted 6H-SiC using TEM}{\textquotedblright}. Suvorov AV, Lebedev OI, Suvorova AA, van Landuyt J, Usov IO, Nuclear instruments and methods in physics research: B \textbf{127/128}, 347 (1997).   http://doi.org/10.1016/S0168-583X(96)00954-8

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