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\bibitem{Tinck+Bogaerts2011} {\textquotedblleft}\textit{Computer simulations of an oxygen inductively coupled plasma used for plasma-assisted atomic layer deposition}{\textquotedblright}. Tinck S, Bogaerts A, Plasma sources science and technology \textbf{20}, 015008 (2011).   http://doi.org/10.1088/0963-0252/20/1/015008

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