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\bibitem{Bultinck+Bogaerts2011} {\textquotedblleft}\textit{Characterization of an Ar/O$_{2}$ magnetron plasma by a multi-species Monte Carlo model}{\textquotedblright}. Bultinck E, Bogaerts A, Plasma sources science and technology \textbf{20}, 045013 (2011).   http://doi.org/10.1088/0963-0252/20/4/045013

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