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\bibitem{Bultinck_etal2009} {\textquotedblleft}\textit{Reactive sputter deposition of TiN$_{x}$ films, simulated with a particle-in-cell/Monte Carlo collisions model}{\textquotedblright}. Bultinck E, Mahieu S, Depla D, Bogaerts A, New journal of physics \textbf{11}, 023039 (2009).   http://doi.org/10.1088/1367-2630/11/2/023039

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