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\bibitem{Gul_etal2015} {\textquotedblleft}\textit{Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching}{\textquotedblright}. Gul B, Tinck S, De Schepper P, Aman-ur-Rehman, Bogaerts A, Journal of physics: D: applied physics \textbf{48}, 025202 (2015).   http://doi.org/10.1088/0022-3727/48/2/025202

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