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\bibitem{Stuer_etal1999} {\textquotedblleft}\textit{Morphology and defects in shallow trench isolation structures}{\textquotedblright}. Stuer C, van Landuyt J, Bender H, Rooyackers R, Badenes G, Conference series of the Institute of Physics \textbf{164}, 443 (1999)

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