%&LaTeX
\documentclass{article}

\usepackage[utf8]{inputenc}
\usepackage[T1]{fontenc}
\usepackage{textcomp}

\begin{document}

\begin{thebibliography}{1}

\bibitem{Zhang_etal2015} {\textquotedblleft}\textit{Modeling and experimental investigation of the plasma uniformity in CF$_{4}$/O$_{2}$ capacitively coupled plasmas, operating in single frequency and dual frequency regime}{\textquotedblright}. Zhang Y-R, Tinck S, De Schepper P, Wang Y-N, Bogaerts A, Journal of vacuum science and technology: A: vacuum surfaces and films \textbf{33}, 021310 (2015).   http://doi.org/10.1116/1.4906819

\end{thebibliography}

\end{document}

