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\bibitem{Stuer_etal2001} {\textquotedblleft}\textit{Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures}{\textquotedblright}. Stuer C, van Landuyt J, Bender H, de Wolf I, Rooyackers R, Badenes G, Journal of the electrochemical society \textbf{148}, G597 (2001).   http://doi.org/10.1149/1.1404970

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