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\bibitem{Bogaerts_etal2003} {\textquotedblleft}\textit{Glow discharge modelling: from basic understanding towards applications}{\textquotedblright}. Bogaerts A, Chen Z, Gijbels R, Surface and interface analysis \textbf{35}, 593 (2003).   http://doi.org/10.1002/sia.1578

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