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\bibitem{Tinck_etal2014} {\textquotedblleft}\textit{Fluorinesilicon surface reactions during cryogenic and near room temperature etching}{\textquotedblright}. Tinck S, Neyts EC, Bogaerts A, The journal of physical chemistry: C : nanomaterials and interfaces \textbf{118}, 30315 (2014).   http://doi.org/10.1021/jp5108872

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