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\bibitem{Zhang_etal2015} {\textquotedblleft}\textit{Fluid simulation of the bias effect in inductive/capacitive discharges}{\textquotedblright}. Zhang Y-R, Gao F, Li X-C, Bogaerts A, Wang Y-N, Journal of vacuum science and technology: A: vacuum surfaces and films \textbf{33}, 061303 (2015).   http://doi.org/10.1116/1.4928033

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