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\bibitem{Herrebout_etal2000} {\textquotedblleft}\textit{An extended RF methane plasma 1D fluid model of interest in deposition of diamond-like carbon layers}{\textquotedblright}. Herrebout D, Bogaerts A, Yan M, Goedheer W, Dekempeneer E, Gijbels R, , 399 (2000)

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