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\bibitem{deWitte_etal2000} {\textquotedblleft}\textit{Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on wafer surfaces}{\textquotedblright}. de Witte H, de Gendt S, Douglas M, Conard T, Kenis K, Mertens PW, Vandervorst W, Gijbels R, Journal of the electrochemical society \textbf{147}, 13 (2000).   http://doi.org/10.1149/1.1393457

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