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\bibitem{Liu_etal2015} {\textquotedblleft}\textit{Electromagnetic effects in high-frequency large-area capacitive discharges : a review}{\textquotedblright}. Liu Y-X, Zhang Y-R, Bogaerts A, Wang Y-N, Journal of vacuum science and technology: A: vacuum surfaces and films \textbf{33}, 020801 (2015).   http://doi.org/10.1116/1.4907926

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