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\bibitem{Vanraes_etal2023} {\textquotedblleft}\textit{Assessing neutral transport mechanisms in aspect ratio dependent etching by means of experiments and multiscale plasma modeling}{\textquotedblright}. Vanraes P, Parayil Venugopalan S, Besemer M, Bogaerts A, Plasma Sources Science and Technology \textbf{32}, 064004 (2023).   http://doi.org/10.1088/1361-6595/acdc4f

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