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\bibitem{Hens_etal2001} {\textquotedblleft}\textit{EFTEM study of plasma etched low-k Si-O-C dielectrics}{\textquotedblright}. Hens S, Bender H, Donaton RA, Maex K, Vanhaelemeersch S, van Landuyt J, Institute of physics conference series
T2 -- Royal-Microscopical-Society Conference on Microscopy of Semiconducting, Materials, MAR 25-29, 2001, UNIV OXFORD, OXFORD, ENGLAND , 415 (2001)

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