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\bibitem{Chen_etal2003} {\textquotedblleft}\textit{Dynamic Monte Carlo simulation for reactive sputtering of aluminium}{\textquotedblright}. Chen ZY, Bogaerts A, Depla D, Ignatova V, Nuclear instruments and methods in physics research: B \textbf{207}, 415 (2003).   http://doi.org/10.1016/S0168-583X(03)01120-0

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