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\bibitem{Bogaerts_etal1995} {\textquotedblleft}\textit{Description of the thermalization process of the sputtered atoms in a glow discharge using a 3-dimensional Monte Carlo method}{\textquotedblright}. Bogaerts A, van Straaten M, Gijbels R, Journal of applied physics \textbf{77}, 1868 (1995).   http://doi.org/10.1063/1.358887

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