%&LaTeX
\documentclass{article}

\usepackage[utf8]{inputenc}
\usepackage[T1]{fontenc}
\usepackage{textcomp}

\begin{document}

\begin{thebibliography}{1}

\bibitem{Tinck_etal2015} {\textquotedblleft}\textit{Cryogenic etching of silicon with SF$_{6}$ inductively coupled plasmas: a combined modelling and experimental study}{\textquotedblright}. Tinck S, Tillocher T, Dussart R, Bogaerts A, Journal of physics: D: applied physics \textbf{48}, 155204 (2015).   http://doi.org/10.1088/0022-3727/48/15/155204

\end{thebibliography}

\end{document}

