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\bibitem{Tinck+Bogaerts2016} {\textquotedblleft}\textit{Role of vibrationally excited HBr in a HBr/He inductively coupled plasma used for etching of silicon}{\textquotedblright}. Tinck S, Bogaerts A, Journal of physics: D: applied physics \textbf{49}, 245204 (2016).   http://doi.org/10.1088/0022-3727/49/24/245204

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