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\bibitem{Setareh_etal2014} {\textquotedblleft}\textit{CF$_{4}$ decomposition in a low-pressure ICP : influence of applied power and O$_{2}$ content}{\textquotedblright}. Setareh M, Farnia M, Maghari A, Bogaerts A, Journal of physics: D: applied physics \textbf{47}, 355205 (2014).   http://doi.org/10.1088/0022-3727/47/35/355205

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