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\bibitem{Ghica_etal2007} {\textquotedblleft}\textit{TEM characterization of extended defects induced in Si wafers by H-plasma treatment}{\textquotedblright}. Ghica C, Nistor LC, Bender H, Richard O, Van Tendeloo G, Ulyashin A, Journal of physics: D: applied physics \textbf{40}, 395 (2007).   http://doi.org/10.1088/0022-3727/40/2/016

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