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\bibitem{Hens_etal2001} {\textquotedblleft}\textit{Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy}{\textquotedblright}. Hens S, van Landuyt J, Bender H, Boullart W, Vanhaelemeersch S, Materials science in semiconductor processing \textbf{4}, 109 (2001).   http://doi.org/10.1016/S1369-8001(00)00147-5

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